Sensing solutions by Lumasense Technologies
Semiconductor

Compound Semiconductor

LumaSense's (formerly Luxtron Corporation) in-situ optical solutions are the most trusted metrology instruments for MOCVD and MBE. For improved thin film deposition, turn to Luxtron’s full line of optical metrology systems designed specifically for Compound Semiconductor film growth.

PhotriX™

Eliminate TC drift. The PhotriX is the industry’s most advanced near IR pyrometer. The superior signal-to-noise ratio (SNR) enables greater precision, faster speeds, and lower temperature measurement capabilities.

Accufiber® TR 

Real-time emissivity corrected true temperature (TT) and reflectance measurements for MBE and MOCVD. Ideal for GaN processes.

 Photrix non contact measurement
Accufiber temperature measurement