The m600 series of OEM Fluoroptic® systems are offered in one, two and four channel versions in a compact DIN-rail module. The instrument offers both analog and digital outputs within the same enclosure. The small form-factor of the m600 series makes it easy for the OEMs to integrate into their equipment.
With a calibrated accuracy of 0.5° C within ±50° C of calibration point, the m600 series has a measurement range of -100° C to +330° C and offers a measurement rate of 4Hz per channel.
Probes and fiber optic extensions can be customized to the OEM application. LumaSense Technologies has a dedicated team of Applications engineers who are experienced with adapting our instruments and probes to OEM process chambers. A variety of standard probes are also available for use with the m600 series for a wide range of applications.
We offer a wide variety of probes that can be adapted to OEM process chambers. LumaSense Technologies has a team of Applications and R&D engineers who have worked with major semiconductor OEMs in the US, Europe and Asia to integrate our fiber optic probes into OEM tools. Our Custom Probes page lists a sampling of probes along with the applications.
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