LumaSense pioneered the first pyrometer with integrated reflectometer (TR 100) in 2001, establishing the industry standard for active emissivity compensation using 950 nm and fiber optics. Our advances in sapphire light-pipe sensors and in-situ blackbody calibration sources provide a complete temperature measurement solution.
The model LumaSense UV 400 and UVR 400 systems are the next generation of temperature sensors developed specifically for GaN-based MOCVD epitaxy processes. The UV 400 and UVR 400 now allow direct measurement of the wafer surface temperature instead of the traditional susceptor/pocket temperature. This improved measurement allows more accurate control of the wafer temperature leading to an improved yield.
These systems are now setting a new standard for LED production processes with results showing reliable correlation between process temperature and final product wavelength.