Semiconductor

LumaSense offers the semiconductor industry with quality temperature process control solutions. In semiconductor applications, a customized fiber optic temperature measurement solution is expected and is a core competency of LumaSense's Luxtron products.

For more than 20 years, LumaSense Technologies (Formerly Luxtron Corporation) has been the premier provider to the semiconductor industry. Hundreds of Fluoroptic^® thermometry probes, remote sensors, and instruments currently designed-in and installed in plasma etch and deposition chambers (CVD, ALD, and PVD). With our headquarters in Santa Clara, CA, we have provided R&D support and joint design development to the leading semiconductor equipment companies in the world.

In addition to our FOT product line (FOT Lab Kit, m600 OEM module, I652 Industrial Monitor), we have also provided optical fiber thermometry (optical pyrometry) PhotriX products in specialized applications to the semiconductor and compound semiconductor industry.

Applications include:

• Electrostatic chuck temperature monitoring and heating control (FOT)
  
• Dynamic wafer temperature monitoring for process optimization (FOT and PhotriX)
  
• RF chamber temperature monitoring (FOT and PhotriX)
  
• Non-contact deposition process monitoring (PhotriX)