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LumaSense Technologies’ Fluoroptic Instruments Enable
Beijing NMC to Improve their ICP Etch Systems |
| Santa Clara CA, February 23, 2007 -- LumaSense Technologies, Inc., a leading provider of sensing solutions, today announced the company is being designed into the newest inductively coupled plasma (ICP) etch systems manufactured by Beijing NMC Co. Ltd (NMC), the first company to commercialize ICP etch systems for semiconductor processing in China. NMC is using LumaSense's Luxtron brand instruments and probes for electrostatic chuck (ESC) temperature monitoring and control for 90nm and larger geometries. Beijing NMC chose LumaSense Technologies Inc. because of their radio frequency (RF) plasma immune temperature probes and extensive application experience in RF plasma etch environments. Luxtron brand Fluoroptic instruments and probes currently are installed in thousands of RF plasma etch chambers worldwide and trusted daily by the largest semiconductor companies. “We are very excited that Beijing NMC chose LumaSense Technologies for their ESC temperature monitoring and control, because of our reputation as the leading provider of optical temperature solutions to the semiconductor and compound semiconductor industries,” said Keith Lam, Product Marketing Manager for LumaSense Technologies. “As semiconductor geometries shrink, more precise ESC temperature control is needed to maintain critical etch dimensions required for metal, silicon and dielectric etch.” About LumaSense Technologies: LumaSense Technologies is a global leader in providing quality sensor instrumentation to the utility, industrial, medical, semiconductor, environmental, transportation, aerospace & defense and oil & gas industries. The company was founded in 2005 with the strategic goal of identifying and acquiring leading sensor companies with complimentary technologies and products - and bringing these technologies together to address customers’ unmet needs in the marketplace. LumaSense’s first two acquisitions: Luxtron Corporation, focused on fiber optic temperature measurement sensors and Innova AirTech Instruments A/S, focused on activities in the field of gas analyses and indoor climate measurements, have been industry pioneers for the last two decades with hundreds of customers around the world. About Beijing NMC Co. Ltd NMC is a semiconductor equipment manufacturer specializing in ETCH, PVD, ALD technologies in China. NMC’s current products including 90nm capable inductively coupled plasma (ICP) etch systems of 8” and 12” for poly gate, tungsten silicide gate as well as shallow trench isolation (STI) with in-situ hardmask open process; NMC is ready and eager to provide a total solution of silicon etch process with our high quality products and professional services to all customers. www.bj-nmc.cn. For more information: Judi Seavers
LumaSense Technologies
+408-235-3813
j.seavers@lumasenseinc.com Vicky Zhang
Beijing NMC Co. Ltd.
+8610-64311959-8038
zhangwei@bj-nmc.cn ###
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