Accufiber®TR

The LumaSense Accufiber^®TR solution provides temperature monitoring with automatic emissivity correction.  Emissivity changes are due to changing material properties during certain types of material deposition or processing.  For specular (smooth) surfaces, the deposition surface’s emissivity can be calculated from its reflectance.  By constantly measuring this reflectance, the AccufiberTR instrument can automatically perform the emissivity correction in-situ and calculate the surface’s true temperature.

AccufiberTR seamlessly integrates ultra precise reflectance measurements with LumaSense’s class leading, lowest signal-to-noise ratio radiation detectors.  If the n and k values are known for the materials, then the amplitude and periodicity of the thin film reflectance (often referred to as “fringes”) at specific wavelengths can be used to calculate film thickness. For thin films, it is critical to use both the highest quality measurement systems and shorter wavelengths to offer “resolution” into the film’s fringes to monitor film thickness.

Uses:

• Thin film deposition rate monitoring during high temperature CVD, MOCVD and MBE processes
  
• Accurate temperature monitoring/control of the susceptor, stage, or chuck during high temperature deposition or processing
  
• Temperature monitoring/control of fast moving or spinning substrates during thin film deposition or rapid thermal processing

Benefits:

• Accurate, emissivity corrected temperature measurement from 450^oC to 1600^oC
  
•  High sampling rate (up to 1000Hz)
  
• Lowest signal to noise ratio
  
• Easy to use touch screen controls

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