IC Industry Solutions
Temperature plays a critical role in the Integrated Circuit industry. LumaSense has worked with equipment makers on a variety of applications for over 30 years. LumaSense’s Luxtron product line pioneered the Fiber Optic Temperature (FOT) technology that uses phosphor fluorescence to measure temperature in the environment with RF, plasma, high voltage, and induction systems.
Accufiber, now part of LumaSense, invented the “Ripple Technique” that solves both the lamp stray radiation and unknown wafer emissivity problems in lamp heated Rapid Thermal Processing (RTP) systems. LumaSense has been a critical supplier to multiple equipment makers. We do customization for special needs.
IC Industry Applications
Etching and Wafer Fab Equipment
Fiber Optic Temperature monitoring for Electrostatic Chucks in Etcher systems and Wafer Fab Equipment
Atomic Layer Deposition
Temperature Monitoring for ALD