IMPAC 测温仪
IS 12-Si

数字式高端测温仪,用于非接触式测量350℃以上的硅片温度。

IMPAC 测温仪 IS 12-Si Front Back View
IMPAC 测温仪 IS 12-Si Front View
IMPAC 测温仪 IS 12-Si Back View
IMPAC 测温仪 IS 12-Si Back Display View
IMPAC 测温仪 IS 12-Si Side Left View
IMPAC 测温仪 IS 12-Si Side View

主要特点

  • 用于测量硅片
  • 350-1800 °C 之间的4种测温范围
  • 光谱范围:近红外窄带,特别用于硅的测量
  • 6个固定镜头和3个调焦镜头
  • 响应时间10毫秒,可调节到10秒

详情

IS 12-Si是IS 12的一个特殊型号,是专为测量硅片温度而开发的。

该测温仪配备了一个近红外窄带滤光器。这样就可以可靠地测量350°C以上的薄硅片,对于红外辐射来说,低于该温度,这一薄硅片就是透明的了。在这个特殊的光谱范围内,硅的辐射率为67%,且不受温度影响。这就使IS 12-Si能够检测出硅片的正确温度。

在温度范围内测量开始时,IS 12-Si对光是敏感的。这个敏感度随着温度的增加而减弱。在温度范围开始时需要低温的应用情况下,这一效果可通过筛选光线来得以避免。

资料

Technical Specifications

MEASUREMENT SPECIFICATIONS
Temperature Ranges

MB 13      400 to 1300 °C      

MB 9        400 to 900 °C        

MB 10      350 to 1000 °C       

MB 18      500 to 1800 °C       

Sub Range: Any range adjustable within the temperature range, minimum span 51 °C
Spectral Ranges: Narrow band in the near infrared, especially for measurements of silicon
Signal Processig: Fotoelectric current, digitized immediately

Accuracy:

(at ε=1, T90=1 s,

Tamb.=23 °C)

below 1500 °C: 0.3% of measured value in °C + 1 °C

above 1500 °C: 0.5% of measured value in °C

Response Time: 10 ms, adjustable up to 10 s
Amb.Temp. Dependency:

tK ≤ 0.01% of reading (in °C) x dT

(temperature of pyrometer housing - 23 °C)

Resolution:

interface and display: 0.1°C,

analog output: < 0.025 % of temperature range

Repeatability: 0.1% of measured value in °C + 1°C
Emissivity ε: 0.100 ... 1.000 in 1/1000 steps
Exposure Time t90: < 1 ms ("L" temperature ranges with dynamical adaptation at low signal levels), adjustable up to 10 s
Maximum Value Storage:

single or double storage; cleared by:

- preselected time interval

- external deletion contact or via digital interface - automatically with the next measuring object

Sighting: built-in parallax free thru-lens view finder; additionally laser targeting light (max. power level < 1 mW, λ = 630-680 nm, CDRH class II)

Note: The calibration / adjustment of this pyrometer is carried out in accordance with VDI/ VDE 3511, Part 4.4. See http://info.lumasenseinc.com/calibration for more information. 

COMMUNICATION  / INTERFACE


Analog Output:

 

linear 0 ... 20 mA or 4 ... 20 mA, DC, switchable; load max. 500 Ohm

Serial Interface: switchable at the pyrometer: RS232 or RS485 addressable, half duplex; baud rate 2.4 up to 115 kBd
Display: built-in 5 digit LED display, additional function LEDs
Test Current Output: 

fixed 10 mA

Limit switches: 2 relay outputs (change-over contacts), switch power max. 30 W (Imax: 1 A, Umax: 60 V DC)
Control Panel: 4 keys, operate with tip of ball-point pen
Parameters:

Adjustable at the instrument or via serial interface:

emissivity ε, response time t90, clear time for maximum value storage tCL, subrange, 0 to 20 or 4 to 20 mA, switch points for limit switches, °C / °F, interface RS232 or RS485, address, baud rate, test current output

Additionally adjustable (only via interface): keyboard lock, recalibration (with special software)

ELECTRICAL  
Power Supply: 24 V DC (15 to 40 V DC) or 24 V AC (12 to 30 V AC), 48 to 62 Hz
Power Consumption: max. 7 W
Isolation: power supply, digital interface, analog output are galvanically isolated against each other and housing
ENVIRONMENTAL 
Ambient Temperature: 0 to 70 °C at housing, no condensating conditions
Storage Temperature: -20 to 70 °C
Rel. Humidity: Non condensing conditions
Protection Class: IP65 (DIN 40 050)
Weight: 2.2 kg
CE-Label: according to EU directives about electromagnetic immunity
IMPAC 测温仪 IS 12-Si
MB 9 Fixed Optics 1 a=80 mm
MB 9 Fixed Optics 2 a=120 mm
MB 9 Fixed Optics 3 a=250 mm
MB 9 Fixed Optics 4 a=660 mm
MB 9 Fixed Optics 5 a=1300 mm
MB 9 Fixed Optics 6 a=5600 mm
MB 13 Foc. Optics 1 a=275...520 mm
MB 13 Foc. Optics 2 a=385...1125 mm
MB 13 Foc. Optics 3 a=540...9000 mm
MB 10L Fixed Optics 2 a=120 mm
MB 10L Fixed Optics 3 a=250 mm
MB 10L Fixed Optics 4 a=660 mm
MB 10L Fixed Optics 5 a=1300 mm
MB 10L Fixed Optics 6 a=5600 mm
MB 18 Fixed Optics 1 a=80 mm
MB 18 Fixed Optics 2 a=120 mm
MB 18 Fixed Optics 3 a=250 mm
MB 18 Fixed Optics 4 a=660 mm
MB 18 Fixed Optics 5 a=1300 mm
MB 18 Fixed Optics 6 a=5600 mm

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