Epitaxy is probably one of the most important processes in compound semiconductor industry. The process requires very accurate wafer temperature control, which directly affects the yield.
LumaSense has long been in the industry. Some of our M100 controllers are still used in older MOCVD reactors. LumaSense is a pioneer in Emissivity Corrected Pyrometers (ECP) and was the first to launch the first commercial an ECP (TR100) for MOCVD in 2002. Its use of fiber optics is the benchmark in the industry. LumaSense’s newer generation solution for GaN on sapphire or SiC (T 400/UV 400) was the first UV pyrometer qualified by commercial tool makers for GaN based LED chip production. LumaSense offers solutions for both MOCVD and Molecular Beam Epitaxy (MBE) which may be customized for specific needs.
Compound Semiconductor Applications
MOCVD - LED Chips
Temperature Monitoring for LED Chips