Ätzung und Waferherstellung
LumaSense is a leading supplier of Fiber Optic Temperature monitoring for Electrostatic Chucks in Etcher systems and Wafer Fab Equipment. Our solutions deliver the accuracy and low noise performance needed for new and future requirements, higher sampling rates for monitoring faster ramp conditions, and high temperature range for Etcher and Wafer Fab process requirements. In addition we provide “Mix and Match” probe and electronic module or converter solutions, custom probes, and have over 25 years of experience integrating fiber optic temperature solutions into challenging semiconductor applications.
Etching and Wafer Fab equipment suppliers are faced with smaller line width and reliability challenges. LumaSense has the right products and people to meet the fast paced development and design challenges with over 25 year experience in providing Fiber Optic Temperature monitoring solutions to the Etching and Wafer Fab Equipment industry.
LumaSense provides the new m920 Series Semiconductor OEM Module, the Series m822 and m600 OEM modules, Accudisc non-contact and different contact probes for Etcher and Wafer Fab Equipment temperature monitoring. We can customize probes for your particular application, and also provide technical application support.
Please contact us for more information on different probes available for Etching applications.
High accuracy and temperature range for different Etching and Wafer Fab processes
Fast sample rate enables monitoring of faster ramp conditions
Low noise solution for better temperature measurements
High reliability for low failure rates