LumaSense is a leading supplier of Fiber Optic Temperature monitoring systems for Electrostatic Chucks in Etcher systems. Our solutions provide the accuracy needed for new and future requirements for smaller line widths, fast sampling rates for increasing wafer throughput, and high temperature range for Etcher requirements. In addition we provide “Mix and Match” probe and electronic module solutions, custom probes, and have over 25 years of experience integrating fiber optic temperature solutions into challenging semiconductor applications.
Etching equipment suppliers are faced with smaller line width, higher throughput and reliability challenges. LumaSense has the right products and people to meet the fast paced development and design challenges with over 25 year experience in providing Fiber Optic Temperature monitoring solutions to the Etching industry.
LumaSense provides the Series m822 and m600 two and four channel OEM modules with Accudisc non-contact probes and many different contact probes for Electrostatic Chuck temperature monitoring. We can customize probes for your particular application, and also provide technical application support.
Please contact us for more information on different probes available for Etching applications.
- High accuracy and temperature range for different Etching processes
- Fast sample rate for increasing wafer throughput
- High reliability for low failure rates
- Provide custom probes for your process and equipment
- Highly experienced technical applications and service support