Lösungen für die Temperaturmessung in der Halbleiterindustrie
Temperature plays a critical role in the efficacy of semiconductor manufacturing equipment. LumaSense is seasoned in the various challenges of measuring temperature within the semiconductor industry and offers a wide range of both non-contact and contact based methods for the best solution.
Luxtron, now part of LumaSense, is located in the silicon valley and has been working with the semiconductor industry since the 80s and has been a critical supplier for major global semiconductor capital equipment companies.
With the consolidation of other famous, long-history thermal instrumentation companies, LumaSense is now able to offer the semiconductor industry a complete line of high performance temperature process solutions that are critical for semiconductor capital equipment. Our solutions meet the latest equipment requirements in the demanding semiconductor industry to help increase production throughput and quality.
Temperature Solutions for Etching, Epitaxy and Deposition Processes
Temperature Solutions for MOCVD and MBE