Luxtron m822 Semiconductor OEM Board
Accurate and Reliable Temperature Sensing
LumaSense Technologies' m822 OEM board is designed for Semiconductor OEMs that need a flexible, reliable, and cost effective solution for high performance temperature measurement.
- 1 or 2 channel versions
- “Mix and Match” Probes with boards and channels
- Stable design with thousands of systems installed worldwide
- Custom Probes for OEM's Applications
- Single PCB OEM board or enclosed in a metal box
- Probes are EMI, RF microwave and high voltage immune
Field Proven Fiber Optic Temperature Sensing
LumaSense Technologies has more than 25 years experience integrating fiber optic temperature solutions into challenging applications. Thousands of the m822 OEM boards have been installed with reliable performance. Our experienced applications engineering team in Santa Clara, CA supports custom integration and probe designs.
Flexible Mix and Match Probe Design
The m822 and LumaSense custom probes are designed to allow complete mix and match of components. Any m822 board can be used with any probe on any channel without calibration. The m822 has built in calibration tables matched to the custom LumaSense semiconductor probes for high accuracy measurements. LumaSense Technologies has a long history of designing reliable probes for the most demanding FOT applications. Our engineers use their process and materials knowledge and in-house manufacturing capabilities to design the best probe for your application.
Easy Integration into OEM Equipment
The small, single board system includes both serial interface and analog outputs. The 822 board conditions the measurement signal from Fluoroptic® probes and reports a calibrated temperature to the OEM control system. The custom non-metallic sensors are safe in the harsh environments and connects to the m822 board via robust fiber optics.
The m822 OEM system works with all current Luxtron® brand Fluoroptic probes and fiber optic extensions. With more than 25 years of experience and thousands of systems installed worldwide, the Luxtron brand is the most trustworthy source for fiber optic temperature measurements.
- Plasma Etch Electro Static Chuck monitoring
- Plasma Shower monitor inside chamber
- Semiconductor and FPD processing using RF and Plasma
- High voltage equipment monitoring
- MRI and RF medical treatment
- Utility and Industrial Applications
|Measurement Rate||10 Hz / 5 Hz|
|Measurement Range||-100 to 330 °C (probe dependent)|
|Electrical Interference||Probes Immune to EMI, RF, and microwave|
|Accuracy (Probe Dependent)||±0.5 °C|
|Repeatability (Precision)||<0.1 °C RMS @ 1 Hz|
|Output Format||Selectable °C, °F and °K|
|Self Diagnostic||Self Diagnosis and Probe Errors Available on RS232|
|Input power||24VDC ±10% @ 300mA|
|Analog Output||0 to 10 V|
|Storage Temperature||-30 to +75 °C|
|Operating Temperature||10 °C to 50 °C, 80% RH (Max) Non-condensing|
|Optional Accessory||Metal Enclosure for Electromagnetic Shielding|