IMPAC Pyrometer
IS 12-Si

Digital high-end pyrometer for non-contact temperature measurement of silicon wafers from 350 °C

Pyrometer IMPAC IS12-Si Front Back View
Pyrometer IMPAC IS12-Si Back View
Pyrometer IMPAC IS12-Si Back Display View
Pyrometer IMPAC IS12-Si Front View
Pyrometer IMPAC IS12-Si Side Left View
Pyrometer IMPAC IS12-Si Side Left View

Key Features

  • For measurements of silicon wafers
  • 4 Temperature ranges between 350 and 1800 °C
  • Spectral range: narrow band in the near infrared, especially for measurements of silicon
  • 6 fixed optics and 3 focus-able optics
  • Response time 10 ms, adjustable up to 10 s

Details

The IS 12-Si is a special version of the IS 12, developed for the temperature measurement of silicon wafers.

The pyrometer is equipped with a optical narrow band filter in the near infrared. This enables a reliable measurement of thin silicon from 350°C which otherwise is transparent for infrared radiation. In this special spectral range the emissivity of silicon is 67% and it is almost independent from temperatures. This allows the IS 12-Si to detect the correct temperature of the silicon wafer.

In the beginning of the temperature range the IS 12-Si is sensitive against light. The sensitivity decreases with increasing temperature. In applications which require the low temperatures at the beginning of the range this effect can be avoided by screening against the light.

Documentation

Technical Specifications

MEASUREMENT SPECIFICATIONS
Temperature Ranges

MB 13      400 to 1300 °C      

MB 9         400 to 900 °C        

MB 10       350 to 1000 °C       

MB 18       500 to 1800 °C       

Sub Range: Any range adjustable within the temperature range, minimum span 51 °C
Spectral Ranges: Narrow band in the near infrared, especially for measurements of silicon
Signal Processing: Fotoelectric current, digitized immediately

Accuracy:

(at ε=1, T90=1 s, Tamb.=23 °C)

below 1500 °C: 0.3% of measured value in °C + 1 °C

above 1500 °C: 0.5% of measured value in °C

Response Time: 10 ms, adjustable up to 10 s
Ambient Temperature Dependency:

tK ≤ 0.01% of reading (in °C) x dT

(temperature of pyrometer housing - 23 °C)

Resolution:

interface and display: 0.1°C,

analog output: < 0.025 % of temperature range

Repeatability: 0.1% of measured value in °C + 1°C
Emissivity ε: 0.100 ... 1.000 in 1/1000 steps
Exposure Time t90: < 1 ms ("L" temperature ranges with dynamical adaptation at low signal levels), adjustable up to 10 s
Maximum Value Storage:

single or double storage; cleared by:

- preselected time interval

- external deletion contact or via digital interface - automatically with the next measuring object

Sighting: built-in parallax free thru-lens view finder; additionally laser targeting light (max. power level < 1 mW, λ = 630-680 nm, CDRH class II)

Note: The calibration / adjustment of this pyrometer is carried out in accordance with VDI/ VDE 3511, Part 4.4. See http://info.lumasenseinc.com/calibration for more information. 

COMMUNICATION  / INTERFACE


Analog Output:

 

linear 0 ... 20 mA or 4 ... 20 mA, DC, switchable; load max. 500 Ohm

Serial Interface: switchable at the pyrometer: RS232 or RS485 addressable, half duplex; baud rate 2.4 up to 115 kBd
Display: built-in 5 digit LED display, additional function LEDs
Test Current Output: 

fixed 10 mA

Limit switches: 2 relay outputs (change-over contacts), switch power max. 30 W (Imax: 1 A, Umax: 60 V DC)
Control Panel: 4 keys, operate with tip of ball-point pen
Parameters:

Adjustable at the instrument or via serial interface:

emissivity ε, response time t90, clear time for maximum value storage tCL, sub range, 0 to 20 or 4 to 20 mA, switch points for limit switches, °C / °F, interface RS232 or RS485, address, baud rate, test current output

Additionally adjustable (only via interface): keyboard lock, recalibration (with special software)

ELECTRICAL  
Power Supply: 24 V DC (15 to 40 V DC) or 24 V AC (12 to 30 V AC), 48 to 62 Hz
Power Consumption: max. 7 W
Isolation: power supply, digital interface, analog output are galvanically isolated against each other and housing
ENVIRONMENTAL 
Ambient Temperature: 0 ... 70 °C at housing, no condensating conditions
Storage Temperature: -20 ... 70 °C
Rel. Humidity: Non condensing conditions
Protection Class: IP65 (DIN 40 050)
Weight: 2.2 kg
CE-Label: according to EU directives about electromagnetic immunity
IMPAC Pyrometer IS 12-Si
MB 9: Fixed Optics 1 a=80 mm
MB 9: Fixed Optics 2 a=120 mm
MB 9: Fixed Optics 3 a=250 mm
MB 9: Fixed Optics 4 a=660 mm
MB 9: Fixed Optics 5 a=1300 mm
MB 9: Fixed Optics 6 a=5600 mm
MB 13: Foc. Optics 1 a=275...520 mm
MB 13: Foc. Optics 2 a=385...1125 mm
MB 13: Foc. Optics 3 a=540...9000 mm
MB 10L: Fixed Optics 2 a=120 mm
MB 10L: Fixed Optics 3 a=250 mm
MB 10L: Fixed Optics 4 a=660 mm
MB 10L: Fixed Optics 5 a=1300 mm
MB 10L: Fixed Optics 6 a=5600 mm
MB 18: Fixed Optics 1 a=80 mm
MB 18: Fixed Optics 2 a=120 mm
MB 18: Fixed Optics 3 a=250 mm
MB 18: Fixed Optics 4 a=660 mm
MB 18: Fixed Optics 5 a=1300 mm
MB 18: Fixed Optics 6 a=5600 mm

Display of optical path:

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