Luxtron m822 Semiconductor OEM Board

Accurate and Reliable Temperature Sensing

LumaSense Technologies' m822 OEM board is designed for Semiconductor OEMs that need a flexible, reliable, and cost effective solution for high performance temperature measurement.

m822 Semiconductor OEM Board


  • 1 or 2 channel versions
  • “Mix and Match” Probes with boards and channels
  • Stable design with thousands of systems installed worldwide
  • Custom Probes for OEM's Applications
  • Single PCB OEM board or enclosed in a metal box
  • Probes are EMI, RF microwave and high voltage immune

Field Proven Fiber Optic Temperature Sensing

LumaSense Technologies has more than 25 years experience integrating fiber optic temperature solutions into challenging applications. Thousands of the m822 OEM boards have been installed with reliable performance. Our experienced applications engineering team in Santa Clara, CA supports custom integration and probe designs.

Flexible Mix and Match Probe Design

The m822 and LumaSense custom probes are designed to allow complete mix and match of components. Any m822 board can be used with any probe on any channel without calibration. The m822 has built in calibration tables matched to the custom LumaSense semiconductor probes for high accuracy measurements. LumaSense Technologies has a long history of designing reliable probes for the most demanding FOT applications. Our engineers use their process and materials knowledge and in-house manufacturing capabilities to design the best probe for your application.

Easy Integration into OEM Equipment

The small, single board system includes both serial interface and analog outputs. The 822 board conditions the measurement signal from Fluoroptic® probes and reports a calibrated temperature to the OEM control system. The custom non-metallic sensors are safe in the harsh environments and connects to the m822 board via robust fiber optics.


The m822 OEM system works with all current Luxtron® brand Fluoroptic probes and fiber optic extensions. With more than 25 years of experience and thousands of systems installed worldwide, the Luxtron brand is the most trustworthy  source for fiber optic temperature measurements.

Typical Applications

  • Plasma Etch Electro Static Chuck monitoring
  • Plasma Shower monitor inside chamber
  • Semiconductor and FPD processing using RF and Plasma
  • High voltage equipment monitoring
  • MRI and RF medical treatment
  • Utility and Industrial Applications


Technical Specifications

m821, m822
Channels m821: 1
m822: 2
Measurement Rate 10 Hz / 5 Hz
Measurement Range -100 to 330 °C (probe dependent)
Electrical Interference Probes Immune to EMI, RF, and microwave
Accuracy (Probe Dependent) ±0.5 °C
Repeatability (Precision) <0.1 °C RMS @ 1 Hz
Output Format Selectable °C, °F and °K
Self Diagnostic Self Diagnosis and Probe Errors Available on RS232
Input power 24VDC ±10% @ 300mA
Serial Interface RS232C
Analog Output 0 to 10 V
Storage Temperature -30 to +75 °C
Operating Temperature 10 °C to 50 °C, 80% RH (Max) Non-condensing
Optional Accessory Metal Enclosure for Electromagnetic Shielding

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