Monocrystalline Silicon Growth
Monocrystalline silicon is commonly used in the IC industry and the solar industry. In the solar industry, the monocrystalline wafers result in higher efficiency than that of the multicrystalline ones.
The Czochralski (CZ) process has become the standard for single crystal silicon production. Today, the furnace designs have been fully automated.
In automated Czochralski process, it is important to measure the melt temperature correctly with good repeatability, so the seed-dipping operation can be automated. For temperature feedback control, the graphite heater temperature should be measured with good accuracy as well.
Lumasense offers the following solutions:
- Measurement of the melt temperature: Depending on customer’s furnace/viewport design, our carefully designed/selected optics minimizes stray radiation effect.
- Measurement of the heater temperature: Allows accurate temperature control.