Pyrometers
UV 400 and UVR 400

The model LumaSense UV 400 and UVR 400 systems are the next generation of temperature sensors developed specifically for GaN-based MOCVD epitaxy processes.

Pyrometer UV 400 and UVR 400 Front and Back View
Pyrometer UV 400 and UVR 400 Front View
Pyrometer UV 400 and UVR 400 Back View
Pyrometer UV 400 and UVR 400 Back View

Key Features

  • Measure temperature directly on the GaN layer using UV wavelength instrumentation
  • Provides a wide temperature range (650 … 1300 °C) to allow coverage of both main buffer growth and MQW growth
  • Minimize noise in measurement using true photon-counting instrumentation
  • Capture real time reflectance measurement using a fast pulsing light source
  • Includes 2 interface types: Analog output and RS485 with UPP protocol

Details

LumaSense pioneered the first pyrometer with integrated reflectometer (TR 100) in 2001, establishing the industry standard for active emissivity compensation using 950 nm and fiber optics. Our advances in sapphire light-pipe sensors and in-situ blackbody calibration sources provide a complete temperature measurement solution.

The UV 400 and UVR 400 now allow direct measurement of the wafer surface temperature instead of the traditional susceptor/pocket temperature. This improved measurement allows more accurate control of the wafer temperature leading to an improved yield.

These systems are now setting a new standard for LED production processes with results showing reliable correlation between process temperature and final product wavelength.

Benefits

  • Improve yield through accurate true wafer temperature measurement
  • Obtain reliable wafer temperature with PL wavelength correlation
  • Prevent residue temperature oscillation as seen in NIR emissivity-compensated pyrometers
  • Realize continuous real time reflectance measurement
  • Prevent data skew due to delayed sampling (no shutter on and off)
  • Provides a complete solution for reactor temperature control with PhotriX and concentric lightpipe options

Documentation

Technical Data

 

Measurement Specifications
Temperature Range:  650 to 1300 °C

Sub Range:

 

Any range adjustable within the temperature range, minimum span 51 °C

Spectral Range: 383 to 410 nm (10% of values)
Detector: Photomultiplier, dark count range < 1% of the raw value at 650 °C

Latency time between 2 measurements:

< 1 µs

Resolution:

0.1 °C at interface; < 0.025% of the set partial measurement range at the analog output (12 bits)

Emissivity ε:
 

0.100 to 1.000 in steps of 1/1000
Transmittance τ: 0.100 to 1.000 in steps of 1/1000
T Integration Time: Min of 8 ms

Measurement Uncertainty: (ε = 1, t90 = 1 s, Thous. = 28 °C)

Up to 1000 °C: 3 °C

Above 1000 °C: 0.3% of the measurement value in °C

(Note: the pyrometer must be in operation for 30 minutes before these values are valid).

Repeatability: (ε = 1, t90 = 1 s, Thous. = 28 °C) 0.1% of the measurement value in °C + 0.1 °C
Environmental Specifications
Protection Type: IP 40 IEC 60529

Vacuum and gas conditions:

Device withstands an atmosphere of nitrogen and a vacuum (< 10 mbar). Housing has air opening

Installation Position: any 
Operating Temperature: 10 to 38 °C on the housing
Storage Temperature: -20 to +50 °C 
Relative Humidity: Non condensating conditions
Weight: 2.5 kg (instrument without adapter)
Housing:  Black anodized aluminum 
CE Label: According to EU directives about electromagnetic immunity
Interface   

Connections:

M12 (8-pin) plug connector for the power supply, RS485 and analog output of the measurement temperature

M12 (4-pin) plug connector for the analog output of reflectance measurement

Parameters:

Adjustable via interface: Emissivity ε, Transmittance τ,setting time t90, delete time td, 0 to 20 or 4 to 20 mA analog output (switchable), sub range

RS485: address, baud rate, wait time tW Readable via interface: Internal detector temperature in 0.1°C

Communication

Analog Output:

0 to 20 mA or 4 to 20 mA, linear (via digital interface)

Digital Interface:

RS485 addressable (semi-duplex) Baud rate: 1200 to 38400 

Maximum Value Storage: Built-in single or double storage. Clearing with adjusted time tclear (off; 0.01 s; 0.05 s; 0.25 s; 1 s; 5 s; 25 s) via interface

Electrical 

Power Consumption: Max. 5 W 

Load (analog output):

0 to 500 Ω

Isolation:

Power supply, analog output and digital interface are electrically isolated from each other
Reflectance Measurement (UVR 400 only)
Measuring range:    0 … 100% 
Speed: 1000 Hz 
Light source: Laser diode 
Detection wavelength: 635 nm ± 5 nm 

Measurement Uncertainty: 

(Thous. = 25 °C) 

2% of range 

Repeatability: (Thous. = 25 °C)   0.5% of range
Acceptable tilt tolerance of wafer:  0.3° 
Optical working distance a:   100 mm
Analog output: 0 to 20 mA or 4 to 20 mA (linear); switchable 
Load:  0 to 500 Ohm

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