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Apex RF Generator


High-Power Density for Compact Installation

The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.


  • High power density in a streamlined design 
  • On-board chamber mount, on-tool frame mount, rack mount, and shoebox options 
  • Wideband control loops
  • Optional pulse control
  • High-speed arc management


  • Readily integrate process tools with enhanced flexibility
  • Stabilize plasma operation
  • Improve yield for fast arc management
  • Easily customize and configure to your process requirements


Cooling: water
Output Frequency (MHz, kHz): 13.56 MHz
Input Voltage (V): 208 VAC
Power Level (kW): 1.5 to 10 kW
Rack Width: 1/2 rack and full rack
Height (Inches): 3U
Communications Interface: RS-232, Analog, ethernet, DeviceNet
Advanced Features: Pulsing, CEX
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Technical Documentation


Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.


Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

24/5 Support Available

Get Expert Advice From Our Engineers

We are committed to providing excellent customer service and technical support to our customers. With live chat and phone support, you can reach out to a qualified engineer for help at any time.
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