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Paramount RF Generator


Industry-Leading, Repeatable Power Delivery for Core Plasma Applications

Advance your process development with a new focus on operating flexibility. Paramount® HF RF generators offer wide power ranges, support multiple integration scenarios, and are equipped with standard serial/analog interfaces and other optional communication interfaces. The Paramount HF enables high plasma density and ion energy required by high aspect ratio devices and speeds process for the next node of semiconductor processing tools. The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation.


  • Full digital control
  • Frequency tuning, pulsing, and pulse synchronization
  • Real-time power and impedance measurement
  • Arc management
  • Phase synchronization (CEX)


  • Enhance plasma stability and process repeatability
  • Precisely control RF power
  • Quickly respond to plasma changes
  • Easily adapt to meet specific application needs


Cooling: Hybrid (air and water)
Output Frequency (MHz, kHz): 2 to 60 MHz
Input Voltage (V): 208, 400, 480 VAC
Power Level (kW): 3 to 15 kW
Rack Width: Half and Full rack
Height (Inches): 3U
Communications Interface: EtherCAT, Ethernet, DeviceNet, RS-232
Advanced Features: Pulsing, CEX, arc management, MBFT
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Technical Documentation


Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

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Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

Agreement Term Options

Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

Agreement Term Options

Upgrades & Enhancements

Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality


Convert your outdated AE unit to a newer version to extend product life and add new features for a fraction of the cost of a new purchase


Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit

Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.


Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

24/5 Support Available

Get Expert Advice From Our Engineers

We are committed to providing excellent customer service and technical support to our customers. With live chat and phone support, you can reach out to a qualified engineer for help at any time.
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