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Rapid Ox Remote Plasma Source


Ideal Remote Plasma Source for Oxygen-Based Processes

Reduce recombination effects and extend the lifetime of oxygen radicals thanks to Rapid OX's removable quartz liner. When compared to anodized chambers, the resultant reactive species extended lifetime improves photoresist strip rates. And because the quartz liner is easily installed or removed by the operator, it decreases downtime and significantly lowers replacement costs.


  • Quartz liner makes it ideal for photoresist ashing or carbon chamber clean processes
  • Variable frequency matching provides a range of plasma impedance operation, controlled by varying gas chemistry, pressure, and power set point
  • Improved thermal management helps ensure long chamber lifetime
  • Rapid OX quickly ignites and reaches steady-state operation due to low dynamic pressure overshoot


  • Significantly reduce downtime and cost of ownership via a removable and replaceable quartz chamber
  • Improve process performance thanks to a high dissociation rate and high-density radical generation
  • Ensure repeatable, controllable processes with variable frequency tuning and precise power control
  • Increase the chamber lifetime and reduce service costs thanks to the reliable design and cooling system
  • Improve tool utilization, reduce preventive maintenance, and lower CoO


Kühlung: Hybrid (air and water)
Ausgangsfrequenz (MHz, kHz): 400 kHz
Eingangsspannung (V): 208 VAC
Leistungsstufe (kW): 6 kW
Rack Breite: N/A, chamber mounted
Kommunikationsschnittstelle: RS-232, Analog, Ethernet
Anwendungen verarbeiten: Chamber Clean
Chemische Verträglichkeit: O2, N2
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Technische Dokumentation


Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

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Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

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Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.

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Calibration and Alignment

Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications.  Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards​.

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Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit

Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

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